Ἕως καὶ ταῦτα ἐποίησάν μοι, τὰ ἅγιά μου ἐμίαινον, καὶ τὰ σάββατά μου ἐβεβήλουν,

1. Ἕως
   Until
2. καὶ
   and
3. ταῦτα
   these
   these things
4. ἐποίησάν
   they did
   they made
5. μοι
   to me
6.  
   ,
    
7. τὰ
   the
8. ἅγιά
   holy
   holy things
9. μου
   my
10. ἐμίαινον
    they defiled
11.  
    ,
     
12. καὶ
    and
13. τὰ
    the
14. σάββατά
    sabbaths
15. μου
    my
16. ἐβεβήλουν
    they profaned
    profaned
17.  
    ,
     

Even while they did these things to me, they defiled my holy things and profaned my sabbaths.